SUBSTRATE STORAGE CONTAINER AND EXPOSURE APPARATUS

Provided is a reticle storage container including an inner container 10 which can store a plurality of reticles 16 and an outer container 1 which covers the inner container 10. The outer container 1 is configured to include a gas nozzle 5 which can inject a predetermined gas. The same gas as the gas...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TANAKA OSAMU, TORIUMI KEIGO, SHIBANO KOHEI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING DRYING DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HEATING LIGHTING MECHANICAL ENGINEERING SEMICONDUCTOR DEVICES WEAPONS
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