Systems and Methods for Supporting a Movable Element of an Electromechanical Device
An electromechanical device includes a movable body that is movable along an axis of a direction of motion. The device also includes an actuator beam and a compliant support beam arranged to support the movable body. The compliant support beam includes a first end connected to an anchor and an actua...
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Zusammenfassung: | An electromechanical device includes a movable body that is movable along an axis of a direction of motion. The device also includes an actuator beam and a compliant support beam arranged to support the movable body. The compliant support beam includes a first end connected to an anchor and an actuating portion extending from the anchor and in a direction that is transverse to the axis of the direction of motion and away from the anchor. The actuating portion is also arranged adjacently and spaced apart from the actuator beam. The compliant support beam also includes a connector portion that is contiguous with the actuating portion and coupled to the movable body. The connector portion extends at least partially back toward the anchor while being arranged adjacently and spaced apart from the actuating portion. |
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