SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

A semiconductor device capable of increasing ON current while reducing channel resistance and allowing transistors to operate independently and stably, having a fin formed to protrude from the bottom of a gate electrode trench, a gate insulating film covering the surfaces of the gate electrode trenc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OYU KIYONORI, MORI KAZUTO, OKONOGI KENSUKE
Format: Patent
Sprache:eng
Schlagworte:
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