SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

A semiconductor device capable of increasing ON current while reducing channel resistance and allowing transistors to operate independently and stably, having a fin formed to protrude from the bottom of a gate electrode trench, a gate insulating film covering the surfaces of the gate electrode trenc...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OYU KIYONORI, MORI KAZUTO, OKONOGI KENSUKE
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device capable of increasing ON current while reducing channel resistance and allowing transistors to operate independently and stably, having a fin formed to protrude from the bottom of a gate electrode trench, a gate insulating film covering the surfaces of the gate electrode trench and the fin, a gate electrode embedded in a lower part of the gate electrode trench and formed to stride over the fin via the gate insulating film, a first impurity diffusion region arranged on a first side face, and a second impurity diffusion region arranged on a second side face.