ELECTRON BEAM APPARATUS
In an electron beam apparatus having a plurality of electron beam columns arranged in a dense arrangement, a transfer device is inserted to operate the electron beam column so that the function and repair may be enhanced. An outer housing of the electron beam column includes a large diameter portion...
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| Sprache: | eng |
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| Zusammenfassung: | In an electron beam apparatus having a plurality of electron beam columns arranged in a dense arrangement, a transfer device is inserted to operate the electron beam column so that the function and repair may be enhanced. An outer housing of the electron beam column includes a large diameter portion and a small diameter portion, and thus a gap may be formed near the small diameter portion. The transfer device penetrates the gap of the electron beam column at an outer periphery in a linear shape, and is connected to the electron beam column at a central portion. |
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