MOTOR MODULES, MULTI-AXIS MOTOR DRIVE ASSEMBLIES, MULTI-AXIS ROBOT APPARATUS, AND ELECTRONIC DEVICE MANUFACTURING SYSTEMS AND METHODS

Motor modules for multi-arm robot apparatus are described. The motor modules can be used individually or stacked and assembled to make up one-axis, 2-axis, 3-axis, 4-axis, 5-axis, 6-axis motor assemblies, or more. One or more of the motor modules have a stator assembly including a stator received in...

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1. Verfasser: KREMERMAN IZYA
Format: Patent
Sprache:eng
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Zusammenfassung:Motor modules for multi-arm robot apparatus are described. The motor modules can be used individually or stacked and assembled to make up one-axis, 2-axis, 3-axis, 4-axis, 5-axis, 6-axis motor assemblies, or more. One or more of the motor modules have a stator assembly including a stator received in the stator housing, and a rotor assembly abutting the stator assembly, the rotor assembly including a rotor housing, a drive shaft, a bearing assembly supporting the drive shaft, and a rotor coupled to the drive shaft. A vacuum barrier member is positioned between the rotor and the stator. Multi-axis motor drive assemblies, multi-axis robot apparatus, electronic device manufacturing systems, and methods of assembling drive assemblies are described, as are numerous other aspects.