TEMPERATURE CALIBRATION AND CONTROL FOR SEMICONDUCTOR REACTORS

Non-contact and non-invasive temperature measurement structures and methods for thermal processing systems which neither damage nor contaminate the thermal processing environment are provided.

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Bibliographische Detailangaben
Hauptverfasser:	ASHJAEE JAY, KRAMER KARL-JOSEF, MOSLEHI MEHRDAD M
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING QUANTITY OF HEAT MEASURING TEMPERATURE PHYSICS TESTING THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Beschreibung
Zusammenfassung:	Non-contact and non-invasive temperature measurement structures and methods for thermal processing systems which neither damage nor contaminate the thermal processing environment are provided.