PATTERNED BACKSIDE METAL GROUND PLANE FOR IMPROVED METAL ADHESION
A patterned backside metal ground plane for improved metal adhesion and methods of manufacture are disclosed herein. The method includes forming at least one die on a substrate. The at least one die is formed adjacent to a dicing channel and includes through silicon vias (TSVs). The method further i...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | A patterned backside metal ground plane for improved metal adhesion and methods of manufacture are disclosed herein. The method includes forming at least one die on a substrate. The at least one die is formed adjacent to a dicing channel and includes through silicon vias (TSVs). The method further includes forming a metalized ground plane on a backside of the substrate in contact with the TSVs and which is located in such areas on the backside of the substrate that it does not interfere with dicing operations performed within the dicing channel. |
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