APPARATUS FOR MEASURING LINE WIDTH

The present invention provides an apparatus for measuring line width, for capturing an image of a pattern to be measured. The apparatus for measuring line width includes at least: a first backlight source and a second backlight source, the first backlight source and the second backlight source being disposed respectively under the pattern to be measured and projecting backlight onto the pattern to be measured; an image capturing device, disposed above the pattern to be measured for capturing the image of the pattern. As such, the present invention effectively avoids causing shadows and improves the precision of image capturing of the image capturing device, as well as reduces the number of required light sources to reduce the cost of modification and maintenance of the apparatus for measuring line width.