METHOD AND APPARATUS FOR BIOCHEMICAL SENSOR ARRAY WITH INTEGRATED CHARGE BASED READOUT CIRCUITRY

METHOD AND APPARATUS FOR BIOCHEMICAL SENSOR ARRAY WITH INTEGRATED CHARGE BASED READOUT CIRCUITRY

A MEMS biochemical sensor configured to sense a target molecule, such as a DNA molecule, a protein molecule, and a viruses molecule. The biochemical sensor may include a cell and a readout module. The cell is configured to be coupled to a probe molecule, to retain a pre-sensing charge before the pro...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KUELAH HALUK, EMINOGLU SELIM
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A MEMS biochemical sensor configured to sense a target molecule, such as a DNA molecule, a protein molecule, and a viruses molecule. The biochemical sensor may include a cell and a readout module. The cell is configured to be coupled to a probe molecule, to retain a pre-sensing charge before the probe molecule is exposed to the target molecule, and to retain a sensing charge after the probe molecule is exposed to the target molecule. The readout module is coupled to the cell and configured to generate a measurement signal based on the pre-sensing charge and the sensing charge.