PROCESS FOR PREPARING TRISILYLAMINE IN THE GAS PHASE

The invention relates to a method for producing trisilylamine from ammoniac and monochlorosilane in the gas phase. The invention further relates to a plant in which such a method can be performed.

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	RAULEDER HARTWIG, UHLICH WILFRIED, DOERING JENS, KNIPPENBERG UDO, LUNT-RIEG INGRID
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS ORGANIC CHEMISTRY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	The invention relates to a method for producing trisilylamine from ammoniac and monochlorosilane in the gas phase. The invention further relates to a plant in which such a method can be performed.