MULTI-CHANNEL LUMINOUS ENERGY SENSING UNIT, APPARATUS FOR MEASURING LIGHT ENERGY OF EXPOSURE DEVICE AND METHOD FOR MEASURING LIGHT ENERGY BY CHANNEL

MULTI-CHANNEL LUMINOUS ENERGY SENSING UNIT, APPARATUS FOR MEASURING LIGHT ENERGY OF EXPOSURE DEVICE AND METHOD FOR MEASURING LIGHT ENERGY BY CHANNEL

The present invention relates to a multi-channel luminous energy sensing unit, an apparatus for measuring light energy of an exposure device and a method for measuring light energy by channel. In accordance with one embodiment of the present invention, a multi-channel luminous energy sensing unit to...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KIM SUN KYONG, BONG EUN HEE, YU SANG YONG, JEON KI JU, KIM SEOK, JEONG JAE YOUN
Format: Patent
Sprache:eng
Schlagworte:
COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
TESTING
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Beschreibung
Zusammenfassung:The present invention relates to a multi-channel luminous energy sensing unit, an apparatus for measuring light energy of an exposure device and a method for measuring light energy by channel. In accordance with one embodiment of the present invention, a multi-channel luminous energy sensing unit to sense an amount of light illuminated from a light source, which includes a board; and a plurality of light sensor modules arranged on the board for sensing at least two channel light with bandwidths different from each other among the light illuminated from the light source, is provided. And also, an apparatus for measuring light energy of an exposure device including the same and a method for measuring light energy by channel are provided.