Porous Composite Membrane Including Microporous Membrane Layers And Nanofiber Layer

A filtration member comprising a nanofiber layer and two nanoporous membrane layers is disclosed. The filtration member can be used to remove particles and gels from photoresist and other fluids by a combination of sieving and non-sieving particle retention mechanisms.

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	RAMIREZ RAUL A
Format:	Patent
Sprache:	eng
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A filtration member comprising a nanofiber layer and two nanoporous membrane layers is disclosed. The filtration member can be used to remove particles and gels from photoresist and other fluids by a combination of sieving and non-sieving particle retention mechanisms.