LINKED VACUUM PROCESSING TOOLS AND METHODS OF USING THE SAME

In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RICE MICHAEL ROBERT, MERRY NIR, SANSONI STEVEN V, HUDGENS JEFFREY C, PURI AMITABH, CORNELIUS ANDREW SCOTT, DECOTTIGNIES ROBERT IRWIN, IRWIN PETER, SZUDARSKI STEVE, HRUZEK DEAN C, ENGLHARDT ERIC A
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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