LINKED VACUUM PROCESSING TOOLS AND METHODS OF USING THE SAME

LINKED VACUUM PROCESSING TOOLS AND METHODS OF USING THE SAME

In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple...

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Bibliographische Detailangaben
Hauptverfasser: RICE MICHAEL ROBERT, MERRY NIR, SANSONI STEVEN V, HUDGENS JEFFREY C, PURI AMITABH, CORNELIUS ANDREW SCOTT, DECOTTIGNIES ROBERT IRWIN, IRWIN PETER, SZUDARSKI STEVE, HRUZEK DEAN C, ENGLHARDT ERIC A
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:In some embodiments, a linked processing tool system is provided that includes (1) a first processing tool having at least a first transfer chamber configured to couple to a plurality of processing chambers; (2) a second processing tool having at least a second transfer chamber configured to couple to a plurality of processing chambers; (3) a third transfer chamber coupled between the first and second processing tools and configured to transfer substrates between the first and second processing tools; and (4) a single sequencer that controls substrate transfer operations between the first processing tool, the second processing tool and the third transfer chamber of the linked processing tool system. Numerous other aspects are provided.