DOCKING DEVICE, DOCKING METHOD

A docking device for connecting a semiconductor probe to a semiconductor handler has in each case one probe-side and one handler-side connecting device, a handling device for handling a contact-making device and a coupling device for coupling the connecting devices. The coupling device has a first s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HUBER WERNER, SUGIANTO YUSMAN, SNG CHENG KHOON CLEMENT
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A docking device for connecting a semiconductor probe to a semiconductor handler has in each case one probe-side and one handler-side connecting device, a handling device for handling a contact-making device and a coupling device for coupling the connecting devices. The coupling device has a first shifting device, which allows the translational and guided shifting of the probe-side connecting device relative to the handler-side connecting device towards and away from one another.