SEMICONDUCTOR STRUCTURE AND PROCESS THEREOF

SEMICONDUCTOR STRUCTURE AND PROCESS THEREOF

A semiconductor structure includes a substrate, a recess and a material. The recess is located in the substrate, wherein the recess has an upper part and a lower part. The minimum width of the upper part is larger than the maximum width of the lower part. The material is located in the recess.

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Bibliographische Detailangaben
Hauptverfasser: CHEN HSUAN-HSU, LIAO JIUNN-HSIUNG, KUO LUNG-EN, LIN YINGIH
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A semiconductor structure includes a substrate, a recess and a material. The recess is located in the substrate, wherein the recess has an upper part and a lower part. The minimum width of the upper part is larger than the maximum width of the lower part. The material is located in the recess.