HEATING SYSTEM FOR A ROLL-TO-ROLL DEPOSITION SYSTEM

Disclosed is a heating system for a roll-to-roll tape deposition system. The heating system includes a sacrificial tape that is transported through a deposition zone between a susceptor plate and a process tape. The sacrificial tape receives an accumulation of deposition material that otherwise may...

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1. Verfasser: SFERLAZZO PIERO
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Disclosed is a heating system for a roll-to-roll tape deposition system. The heating system includes a sacrificial tape that is transported through a deposition zone between a susceptor plate and a process tape. The sacrificial tape receives an accumulation of deposition material that otherwise may accumulate on the susceptor plate and reduce its efficiency and temperature uniformity. In some embodiments, the sacrificial tape is heated by passage of an electrical current, thereby allowing the sacrificial tape to replace the susceptor plate and separate heating elements used to heat the process tape. The sacrificial tape may be provided on a payout roll that passes through the deposition system to a takeup roll or in the form of a continuous loop of tape.