Semiconductor Devices

Semiconductor devices are disclosed. The semiconductor device may include a semiconductor substrate having a first surface and a second surface opposite to each other and a pad trench formed at a portion of the second surface, a through-electrode penetrating the semiconductor substrate and protrudin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BANG SUKCHUL, KANG SUNGHEE, MOON KWANGJIN, PARK YEUN-SANG, PARK BYUNG-LYUL, KIM TAESEONG
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:Semiconductor devices are disclosed. The semiconductor device may include a semiconductor substrate having a first surface and a second surface opposite to each other and a pad trench formed at a portion of the second surface, a through-electrode penetrating the semiconductor substrate and protruding from a bottom surface of the pad trench. A buried pad may be disposed in the pad trench and may surround the through-electrode.