PHASE DIFFERENCE DETECTOR, PHASE DIFFERENCE DETECTION PROGRAM, AND PLASMA PROCESSING SYSTEM USING THE PHASE DIFFERENCE DETECTOR

A phase difference detector detects the phase difference between two AC signals at a high speed and with high accuracy. A phase difference computation unit computes the phase difference phir(=phi2-phi1) between two detected voltages v1 (phase angle: phi1) and v2 (phase angle: phi2). The phase differ...

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Bibliographische Detailangaben
Hauptverfasser:	KASAI YOSHINOBU, YOSHIZAKO YUJI, KITANO TOYOKAZU
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS TESTING
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Beschreibung
Zusammenfassung:	A phase difference detector detects the phase difference between two AC signals at a high speed and with high accuracy. A phase difference computation unit computes the phase difference phir(=phi2-phi1) between two detected voltages v1 (phase angle: phi1) and v2 (phase angle: phi2). The phase difference computation unit uses a sine wave vs and a cosine wave vc generated separately and having the same frequency as the fundamental frequency of the voltages v1 and v2, to perform computation of v2s=v2×vs, v2c=v2×vc, v1s=v1×vs, v1c=v1×vc, and then extracts DC components I2=(-A2/2)·sin(phi2), R2=(A2/2)·cos(phi2), I1=(-A1/2)·sin(phi1), R1=(A1/2)·cos(phi1) at low-pass filters. The phase difference computation unit computes R3=R1×R2+I1×I2 at a complex multiplying unit to obtain R3=(A1·A2/4)·cos(phir), computes I3=R2×I1-R1×I2 to obtain I3=(A1·A2/4)·sin(phir), and computes phir=tan-1(I3/R3) at the arctangent calculation unit, thereby obtaining the phase difference phir.