COUPLING STRUCTURE FOR VACUUM EXHAUST DEVICE AND VACUUM EXHAUST SYSTEM

Provided is a coupling structure for vacuum exhaust devices each including a pump chamber and a casing that demarcates the pump chamber. The coupling structure includes a first end surface formed on a first side of the casing, and a second end surface formed on the second side of the casing, the sec...

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Bibliographische Detailangaben
Hauptverfasser:	OKAMOTO MASATOMO, SUZUKI TOSHIO, SHIBAYAMA KOUJI, TANAKA TOMONARI
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING ENGINE PLANTS IN GENERAL HEATING LIGHTING MACHINES OR ENGINES IN GENERAL MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAMTURBINES POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS STEAM ENGINES WEAPONS
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Beschreibung
Zusammenfassung:	Provided is a coupling structure for vacuum exhaust devices each including a pump chamber and a casing that demarcates the pump chamber. The coupling structure includes a first end surface formed on a first side of the casing, and a second end surface formed on the second side of the casing, the second side being the opposite side of the first side. The casing of a first vacuum exhaust device and the casing of a second vacuum exhaust device among a plurality of vacuum exhaust devices are arranged to be directly superposed on each other such that the first end surface provided to the first vacuum exhaust device and the second end surface provided to the second vacuum exhaust device come into contact with each other. By fastening the first end surface and the second end surface, the first vacuum exhaust device and the second vacuum exhaust device are connected to each other such that gas can flow between the casing of the first vacuum exhaust device and the casing of the second vacuum exhaust device.