METHOD FOR MANUFACTURING BACKSIDE-ILLUMINATED IMAGE SENSOR

A method for manufacturing a backside-illuminated image sensor includes (1) forming an isolation film on the front side of a semiconductor substrate with a buried insulating layer formed therein to define an active region; (2) forming a light-receiving element in the active region of the semiconductor substrate; and (3) forming an inter-layer dielectric layer on the front side of the semiconductor substrate on which the light-receiving element is formed. The method may include forming a super contact hole to pass through the inter-layer dielectric layer and the buried insulating layer in a pad region defined on the front side of the semiconductor substrate reaching the semiconductor substrate. The method may include forming a barrier layer of a metal oxide film containing transition metal at the bottom and sidewall of the super contact hole. The method may include filling a conductive material in the super contact hole, in which the barrier layer is formed, to form a super contact.