METHOD FOR PRODUCING LITHIUM-BASED LAYERS BY CVD

A method for forming by CVD a lithium-based layer, according to which the lithium precursor is in liquid form in a mixture containing a solvent and a Lewis base.

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Bibliographische Detailangaben
Hauptverfasser: JIMENEZ AREVALO MARIA DEL CARMEN, JODIN LUCIE, ACHATZ PHILIPP, DECAMS JEAN-MANUEL, DESCHANVRES JEAN-LUC, POULET SYLVAIN
Format: Patent
Sprache:eng
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Zusammenfassung:A method for forming by CVD a lithium-based layer, according to which the lithium precursor is in liquid form in a mixture containing a solvent and a Lewis base.