WAFER BOX CONVEYER

The wafer box conveyer includes a chassis, a transverse moving mechanism, a longitudinal moving mechanism, a loading mechanism and a shock reduction mechanism. The chassis includes a frame and a plurality of wheels mounted under the frame. The transverse moving mechanism is movably connected to the...

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1. Verfasser: PAN YUNGIN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The wafer box conveyer includes a chassis, a transverse moving mechanism, a longitudinal moving mechanism, a loading mechanism and a shock reduction mechanism. The chassis includes a frame and a plurality of wheels mounted under the frame. The transverse moving mechanism is movably connected to the frame. The longitudinal moving mechanism is movably connected to the transverse moving mechanism. A moving direction of the longitudinal moving mechanism is perpendicular to that of the transverse moving mechanism. The loading mechanism includes at least one tray for a wafer box. The shock reduction mechanism is disposed between the at least one tray and the frame for absorbing a load of the tray.