FINE PARTICLE MEASUREMENT DEVICE
A fine particle measurement device includes a 4f optical system in an optical path that causes a beam spot of a laser output from a light source to form an image with respect to fine particles.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A fine particle measurement device includes a 4f optical system in an optical path that causes a beam spot of a laser output from a light source to form an image with respect to fine particles. |
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