METHOD FOR COATING MICROMECHANICAL PARTS WITH DUAL DIAMOND COATING

METHOD FOR COATING MICROMECHANICAL PARTS WITH DUAL DIAMOND COATING

Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate (4) component to be coated; providing said component with a first diamond coating (2) doped with boron; providing said component with a second diamond coating...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: STEINMUELLER DORIS, DREXEL HERWIG, RICHARD DAVID, GILOMEN BEAT, BOURBAN STEWES, STEINMUELLER DETLEF, GNODBANE SLIMANE
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Method for coating micromechanical components of a micromechanical system, in particular a watch movement, comprising: providing a substrate (4) component to be coated; providing said component with a first diamond coating (2) doped with boron; providing said component with a second diamond coating (3); wherein: said second diamond coating (3) is provided by CVD in a reaction chamber; during CVD deposition, during the last portion of the growth process, a controlled increase of the carbon content within the reaction chamber is provided, thereby providing an increase of the sp2/sp3 carbon (6) bonds up to an sp2 content substantially between 1% and 45%. Corresponding micromechanical components are also provided.