ORGANIC LAYER DEPOSITION APPARATUS, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME

An organic layer deposition apparatus and a method of manufacturing an organic light emitting display apparatus by using the organic layer deposition apparatus. An organic layer deposition apparatus includes: a carrier including a chuck on which a substrate is mounted to form an organic layer; a sca...

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Bibliographische Detailangaben
Hauptverfasser: CHANG YUN-HO, ROH CHEOL-LAE, KANG HEEUL, KIM JONG-HEON, CHANG SEOK-RAK
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An organic layer deposition apparatus and a method of manufacturing an organic light emitting display apparatus by using the organic layer deposition apparatus. An organic layer deposition apparatus includes: a carrier including a chuck on which a substrate is mounted to form an organic layer; a scanning unit including a deposition unit for discharging a deposition raw material, and a patterning slit sheet having a plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction; and a chamber accommodating the carrier and the scanning unit, the scanning unit being arranged to be spaced apart from the substrate and movable relative to the carrier.