GENERATION OF HOLES USING MULTIPLE ELECTRODES

An apparatus for producing holes in dielectric workpieces in the form of thin sheets and substrates, in particular of glass or glass-like materials and semiconductors is provided. The apparatus includes individual high-voltage electrodes that are symmetrically arranged on an electrode holder around...

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Bibliographische Detailangaben
Hauptverfasser: LEHNICKE SABINE, NATTERMANN KURT, PEUCHERT ULRICH, WEIDMANN DIRK, BEHLE STEPHAN, MOEHL WOLFGANG
Format: Patent
Sprache:eng
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Zusammenfassung:An apparatus for producing holes in dielectric workpieces in the form of thin sheets and substrates, in particular of glass or glass-like materials and semiconductors is provided. The apparatus includes individual high-voltage electrodes that are symmetrically arranged on an electrode holder around the hole to be produced in the workpiece. The apparatus also includes individual counter electrodes that are arranged on a counter electrode holder. The electrodes and counter electrodes can be connected in a permutating manner to a high-voltage source for the discharge of high-voltage flashovers.