SURFACE INSPECTION METHOD AND SURFACE INSPECTION APPARATUS

A surface inspection method for inspecting a surface H of an inspection subject having a specular surface H, including: a step in which the surface H of the inspection subject is irradiated with light L from an oblique direction; a step in which measurement is conducted of the intensity of diffracte...

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Bibliographische Detailangaben
Hauptverfasser: SHIMIZU TERUYOSHI, HATSUDA MOTONOBU
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A surface inspection method for inspecting a surface H of an inspection subject having a specular surface H, including: a step in which the surface H of the inspection subject is irradiated with light L from an oblique direction; a step in which measurement is conducted of the intensity of diffracted light D that is diffracted by adhering foreign matter K among light that is regularly reflected by the surface H of the inspection subject; a step in which measurement is conducted of the intensity of scattered light S that is irregularly reflected by the adhering foreign matter K; and a step in which an adhering condition of foreign matter K on the surface H of the inspection subject is determined based on measurement results for the intensity of the diffracted light D that is regularly reflected, and the intensity of the scattered light S that is irregularly reflected.