FLUID SUPPLYING APPARATUS AND SYSTEM AND METHOD FOR CLEANING THIN FILM USING THE SAME

FLUID SUPPLYING APPARATUS AND SYSTEM AND METHOD FOR CLEANING THIN FILM USING THE SAME

A fluid supplying apparatus includes an inner tube having a plurality of holes for distributing a fluid supplied from a supply unit, and an outer tube arranged coaxially or non-coaxially with the inner tube to surround the inner tube and having a plurality of slots for injecting the fluid distribute...

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Bibliographische Detailangaben
Hauptverfasser: SEO YOUNG JU, CHUNG CHAE-HO, CHANG DO-KI, IM YE-HOON, MIN KYOUNG-HOON, KIM JAE-MIN, YEOM KI-KYO, PARK WONAN
Format: Patent
Sprache:eng
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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Beschreibung
Zusammenfassung:A fluid supplying apparatus includes an inner tube having a plurality of holes for distributing a fluid supplied from a supply unit, and an outer tube arranged coaxially or non-coaxially with the inner tube to surround the inner tube and having a plurality of slots for injecting the fluid distributed therein from the holes to the outside. The outer tube substantially has the same length as the inner tube. The fluid supplying apparatus may be used for a thin film cleaning system or method.