SHEET WAFER FURNACE WITH GAS PRESERVATION SYSTEM

SHEET WAFER FURNACE WITH GAS PRESERVATION SYSTEM

A sheet wafer furnace has a chamber having an opening, and a crucible, within the chamber, and spaced from the opening. The furnace also has a puller configured to pull a sheet wafer from molten material in the crucible and through the opening in the chamber, and a seal across the opening of the cha...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YAMARTINO STEPHEN, GLABBEEK LEO VAN, SHERMAN STEVEN
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A sheet wafer furnace has a chamber having an opening, and a crucible, within the chamber, and spaced from the opening. The furnace also has a puller configured to pull a sheet wafer from molten material in the crucible and through the opening in the chamber, and a seal across the opening of the chamber.