SINGLE DISC VAPOR LUBRICATION

Apparatus and method for vapor deposition of a uniform thickness thin film of lubricant on at least one surface of a disk-shaped substrate. The invention has particular utility in depositing thin films of polymeric lubricants onto disc-shaped substrates in the manufacture of magnetic and MO recordin...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: STIRNIMAN MICHAEL JOSEPH, MCLEOD PAUL STEPHEN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Apparatus and method for vapor deposition of a uniform thickness thin film of lubricant on at least one surface of a disk-shaped substrate. The invention has particular utility in depositing thin films of polymeric lubricants onto disc-shaped substrates in the manufacture of magnetic and MO recording media.