FEEDFORWARD CONTROL ADJUSTED WITH ITERATIVE LEARNING

FEEDFORWARD CONTROL ADJUSTED WITH ITERATIVE LEARNING

A method for controlling a mover assembly (220C) includes the steps of: (i) providing a control system (224) that includes a feedback control (440), an iterative learning control (442), and a feedforward control (444); (ii) moving a stage (220A) through a first movement with the mover assembly (220C...

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Bibliographische Detailangaben
1. Verfasser: YANG PAI-HSUEH
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Beschreibung
Zusammenfassung:A method for controlling a mover assembly (220C) includes the steps of: (i) providing a control system (224) that includes a feedback control (440), an iterative learning control (442), and a feedforward control (444); (ii) moving a stage (220A) through a first movement with the mover assembly (220C) being controlled with the control system (224); (iii) collecting first movement information relating to the first movement of the stage (220A) with the iterative learning control (442); (iv) adjusting the iterative learning control (442) using the first movement information; (v) repeating steps (ii) through (iv) until the iterative learning control (442) converges for the first movement; and (vi) adjusting the feedforward control (444) using Iterative information from the iterative learning control (442).