ROTARY ENCODER, ROTARY MOTOR, AND ROTARY MOTOR SYSTEM
The encoder includes a disk in a disk shape that is arranged rotatably about a rotation axis and that includes one track in a ring shape on which a rotating grating is formed and one or more origin detection areas serving as partial areas on which a rotating grating is formed, and a mask that is fix...
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Zusammenfassung: | The encoder includes a disk in a disk shape that is arranged rotatably about a rotation axis and that includes one track in a ring shape on which a rotating grating is formed and one or more origin detection areas serving as partial areas on which a rotating grating is formed, and a mask that is fixed and arranged in a manner facing the disk and on which one or more fixed gratings are formed so as to constitute a diffraction interference optical system together with the rotating gratings. A plurality of slits and included in at least one rotating grating are formed along a curved line obtained by curving a plurality of radial lines about the rotation axis in the circumferential direction at predetermined curvature such that pitches and of the slits and can be set to a predetermined value. |
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