Solenoid Bypass System for Continuous Operation of Pneumatic Valve
A solenoid valve assembly capable of providing a continuous flow of pressurized inert gas to operate a process tool without interruption. A system comprising the solenoid valve assembly is also provided.
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A solenoid valve assembly capable of providing a continuous flow of pressurized inert gas to operate a process tool without interruption. A system comprising the solenoid valve assembly is also provided. |
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