Solenoid Bypass System for Continuous Operation of Pneumatic Valve

A solenoid valve assembly capable of providing a continuous flow of pressurized inert gas to operate a process tool without interruption. A system comprising the solenoid valve assembly is also provided.

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Bibliographische Detailangaben
Hauptverfasser: BARTHOLD JEFFERY C, SMITH ANTHONY JOHN, DAX WILLIAM JOHN
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A solenoid valve assembly capable of providing a continuous flow of pressurized inert gas to operate a process tool without interruption. A system comprising the solenoid valve assembly is also provided.