Force Distribution Method for Stage Systems Utilizing Dual Actuators

According to one aspect, a method for controlling a stage that is a part of a stage apparatus and is coupled to a voice coil motor (VCM) and an EI-core actuator arrangement includes driving the stage, identifying a frequency associated with the stage, and determining whether the frequency is below a...

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Bibliographische Detailangaben
1. Verfasser:	YANG PAI-HSUEH
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRICITY ELECTROGRAPHY GENERATION HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	According to one aspect, a method for controlling a stage that is a part of a stage apparatus and is coupled to a voice coil motor (VCM) and an EI-core actuator arrangement includes driving the stage, identifying a frequency associated with the stage, and determining whether the frequency is below a frequency setpoint. The method also includes providing a first control force on the stage using the EI-core actuator arrangement when it is determined that the frequency is below the frequency setpoint, and providing the first control force on the stage using the VCM when it is determined that the frequency is not below the frequency setpoint.