X-RAY DETECTOR WITH IMPROVED SPATIAL GAIN UNIFORMITY AND RESOLUTION AND METHOD OF FABRICATING SUCH X-RAY DETECTOR

X-RAY DETECTOR WITH IMPROVED SPATIAL GAIN UNIFORMITY AND RESOLUTION AND METHOD OF FABRICATING SUCH X-RAY DETECTOR

An X-raydetector (1) is proposed comprising a light detection arrangement (3) such as a CMOS photodetector, a scintillator layer (5) such as a CsI:T1 layer, a reflector layer (9) and a light emission layer (7) interposed between the scintillator layer (5) and the reflector layer (9). The light emiss...

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Bibliographische Detailangaben
Hauptverfasser: CORNELISSEN HUGO JOHAN, VERSCHUREN COEN ADRIANUS, POORTER TIEMEN, STEINHAUSER HEIDRUN
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASUREMENT OF NUCLEAR OR X-RADIATION
MEASURING
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:An X-raydetector (1) is proposed comprising a light detection arrangement (3) such as a CMOS photodetector, a scintillator layer (5) such as a CsI:T1 layer, a reflector layer (9) and a light emission layer (7) interposed between the scintillator layer (5) and the reflector layer (9). The light emission layer (7) may comprise an OLED and may be made with a thickness of less than 50 μm. Thereby, a sensitivity and resolution of the X-raydetector may be improved.