EXHAUST AIR SYSTEM AND METHOD THEREFOR

EXHAUST AIR SYSTEM AND METHOD THEREFOR

An apparatus for the removal of gaseous reaction products (2) from an inline plant (1) for the single sided wet chemical treatment of flat objects (3) by means of a transport gas (G) has an entry (8), a treatment basin (4) for the reception of a treatment liquid (F), an inline transport device (5) w...

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Hauptverfasser: BAREIS DIRK, LINDERT ANDRE, ROCCIA PASQUALE, KALTENBACH FLORIAN, SPRENGER HOLGER
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEMICONDUCTOR DEVICES
SEPARATION
TRANSPORTING
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creator BAREIS DIRK
LINDERT ANDRE
ROCCIA PASQUALE
KALTENBACH FLORIAN
SPRENGER HOLGER
description An apparatus for the removal of gaseous reaction products (2) from an inline plant (1) for the single sided wet chemical treatment of flat objects (3) by means of a transport gas (G) has an entry (8), a treatment basin (4) for the reception of a treatment liquid (F), an inline transport device (5) with a transport plane (6) for the horizontal transport of the flat objects (3) in transport direction (7), an exit (9), as well as a collection chamber (10) for gaseous reaction products (2) which is arranged above the transport plane (6).
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEMICONDUCTOR DEVICES
SEPARATION
TRANSPORTING
title EXHAUST AIR SYSTEM AND METHOD THEREFOR
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