EXHAUST AIR SYSTEM AND METHOD THEREFOR

An apparatus for the removal of gaseous reaction products (2) from an inline plant (1) for the single sided wet chemical treatment of flat objects (3) by means of a transport gas (G) has an entry (8), a treatment basin (4) for the reception of a treatment liquid (F), an inline transport device (5) w...

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Bibliographische Detailangaben
Hauptverfasser:	BAREIS DIRK, LINDERT ANDRE, ROCCIA PASQUALE, KALTENBACH FLORIAN, SPRENGER HOLGER
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEMICONDUCTOR DEVICES SEPARATION TRANSPORTING
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Beschreibung
Zusammenfassung:	An apparatus for the removal of gaseous reaction products (2) from an inline plant (1) for the single sided wet chemical treatment of flat objects (3) by means of a transport gas (G) has an entry (8), a treatment basin (4) for the reception of a treatment liquid (F), an inline transport device (5) with a transport plane (6) for the horizontal transport of the flat objects (3) in transport direction (7), an exit (9), as well as a collection chamber (10) for gaseous reaction products (2) which is arranged above the transport plane (6).