METHOD AND APPARATUS FOR TESTING A SEMICONDUCTOR DEVICE

METHOD AND APPARATUS FOR TESTING A SEMICONDUCTOR DEVICE

The present disclosure provides an apparatus testing a semiconductor device. The apparatus includes a plurality of testing pads. The apparatus includes a plurality of testing units. The apparatus includes a switching circuit coupled between the testing pads and the testing units. The switching circu...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEE CHIENANG, HSIAO YU-LAN, SHAO JHIH JIE, CHUNG TANG-HSUAN, HUANG SZUIA, TSENG HUAN CHI
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:The present disclosure provides an apparatus testing a semiconductor device. The apparatus includes a plurality of testing pads. The apparatus includes a plurality of testing units. The apparatus includes a switching circuit coupled between the testing pads and the testing units. The switching circuit contains a plurality of switching devices. The apparatus includes a control circuit coupled to the switching circuit. The control circuit is operable to establish electrical coupling between a selected testing unit and one or more of the testing pads by selectively activating a subset of the switching devices.