METAL LAMINATED STRUCTURE AND METHOD FOR PRODUCING THE SAME

There is provided a metal laminated structure in which a first metal layer containing tungsten is provided on a first surface of a second metal layer containing copper and a third metal layer containing tungsten is provided on a second surface of the second metal layer opposite to the first surface,...

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Bibliographische Detailangaben
Hauptverfasser: YAMAGATA SHINICHI, MAJIMA MASATOSHI, ABE YUGAKU, SUWATA OSAMU, HOSOE AKIHISA, YOKOYAMA HIROSHI, NITTA KOJI, INAZAWA SHINJI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:There is provided a metal laminated structure in which a first metal layer containing tungsten is provided on a first surface of a second metal layer containing copper and a third metal layer containing tungsten is provided on a second surface of the second metal layer opposite to the first surface, and the first metal layer contains crystal grains of tungsten in a form of a columnar crystal extending in a direction perpendicular to the first surface of the second metal layer and the third metal layer contains crystal grains of tungsten in a form of a columnar crystal extending in a direction perpendicular to the second surface of the second metal layer, and a method for producing the metal laminated structure.