METHOD OF MANUFACTURING A VIBRATORY ACTUATOR FOR A TOUCH PANEL WITH HAPTIC FEEDBACK

The disclosure relates to a method of manufacturing vibratory elements, comprising forming on a substrate a multilayer structure by an integrated circuit manufacturing method, the multilayer structure comprising an element susceptible of vibrating when it is subjected to an electrical signal, and el...

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Bibliographische Detailangaben
Hauptverfasser: LAFFONT SERGE, GIRARD OLIVIER, CHAPPAZ CEDRICK, GILOT YVES, ANCEY PASCAL
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The disclosure relates to a method of manufacturing vibratory elements, comprising forming on a substrate a multilayer structure by an integrated circuit manufacturing method, the multilayer structure comprising an element susceptible of vibrating when it is subjected to an electrical signal, and electrodes for transmitting an electrical signal to the vibratory element, the vibratory element comprising a mechanical coupling face that is able to transmit to control element vibrations perceptible by a user.