BROKEN WAFER RECOVERY SYSTEM

BROKEN WAFER RECOVERY SYSTEM

An apparatus and method for recovery and cleaning of broken substrates, especially beneficial for fabrication systems using silicon wafer carried on trays. Removal of broken wafers and particles from within the fabrication system is enabled without requiring disassembly of the system and without req...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BLONIGAN WENDELL THOMAS, STEVENS CRAIG LYLE, BERKSTRESSER DAVID ERIC
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COFFEE MILLS
COMPUTING
COUNTING
DOMESTIC ARTICLES OR APPLIANCES
DOMESTIC WASHING OR CLEANING
ELECTRIC DIGITAL DATA PROCESSING
FURNITURE
HUMAN NECESSITIES
PHYSICS
SPICE MILLS
SUCTION CLEANERS IN GENERAL
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Beschreibung
Zusammenfassung:An apparatus and method for recovery and cleaning of broken substrates, especially beneficial for fabrication systems using silicon wafer carried on trays. Removal of broken wafers and particles from within the fabrication system is enabled without requiring disassembly of the system and without requiring manual labor.