System and Method for Removing Oxide from a Sensor Clip Assembly

According to embodiments of the present disclosure, a method for removing oxide includes placing a sensor chip assembly having an oxide layer formed on a portion thereof within an enclosed and controlled environment. The portion of the sensor chip assembly is exposed to a reactive gas and a UV light...

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Bibliographische Detailangaben
Hauptverfasser: HANYALOGLU BENGI F, HAMPP ANDREAS, HARRIS SEAN F, SADIGHI TALIEH H
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:According to embodiments of the present disclosure, a method for removing oxide includes placing a sensor chip assembly having an oxide layer formed on a portion thereof within an enclosed and controlled environment. The portion of the sensor chip assembly is exposed to a reactive gas and a UV light to result in a substantial removal of the oxide layer formed on the portion of the sensor chip assembly.