SELECTING A SURVEY SETTING FOR CHARACTERIZING A TARGET STRUCTURE

Complex-valued sensitivity data structures corresponding to respective candidate survey settings are provided, where the sensitivity data structures relate measurement data associated with a target structure to at least one parameter of a model of the target structure. Based on the sensitivity data...

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Bibliographische Detailangaben
Hauptverfasser: DJIKPESSE HUGUES A, DUCHENNE SEBASTIEN, PRANGE MICHAEL DAVID, MENKITI HENRY, KHODJA MOHAMED-RABIGH
Format: Patent
Sprache:eng
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Zusammenfassung:Complex-valued sensitivity data structures corresponding to respective candidate survey settings are provided, where the sensitivity data structures relate measurement data associated with a target structure to at least one parameter of a model of the target structure. Based on the sensitivity data structures, a subset of the candidate survey settings is selected according to a criterion for enhancing resolution in characterizing the target structure.