High-purity fluorine gas, the production and use thereof, and a method for monitoring impurities in a fluorine gas

An apparatus for producing a fluorine gas, comprising at least one fluorine generating cell, and at least one fluorine generating cell detector for detecting components of products obtained by the fluorine generating cell, wherein at least one of the fluorine generating cells is connected with the f...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: PERNICE HOLGER, BALTHASART DOMINIQUE, FEYS FRANCIS, KRUEGER HARALD, SOMMER CHRISTOPH, EICHER JOHANNES
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:An apparatus for producing a fluorine gas, comprising at least one fluorine generating cell, and at least one fluorine generating cell detector for detecting components of products obtained by the fluorine generating cell, wherein at least one of the fluorine generating cells is connected with the fluorine generating cell detector.