High-Resolution Laser Induced Breakdown Spectroscopy Devices and Methods

Provided are laser induced breakdown spectroscopy (LIBS) devices. Embodiments of the devices are configured to obtain a spatial resolution of 10 μm or less. Also provided are methods of using the subject LIBS devices to determine whether one or more elements of interest are present in a target sampl...

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Hauptverfasser: HWANG DAVID JEN, YOO JONG HYUN, GRIGOROPOULOS COSTAS P, RUSSO RICHARD E
Format: Patent
Sprache:eng
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Zusammenfassung:Provided are laser induced breakdown spectroscopy (LIBS) devices. Embodiments of the devices are configured to obtain a spatial resolution of 10 μm or less. Also provided are methods of using the subject LIBS devices to determine whether one or more elements of interest are present in a target sample. The devices and methods find use in a variety of applications, e.g., submicron and nanoscale chemical analysis applications.