SYSTEM AND METHOD FOR GAS LEAK CONTROL IN A SUBSTRATE HOLDER

An electrostatic clamp includes a heating block for heating a substrate, the heating block having a first surface disposed toward the substrate and a second surface opposite the first surface. A base is arranged to adjoin at least a portion of the second surface of the heating block. The adjoined ba...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BLAKE JULIAN G, MUKA RICHARD S, MILLER TIMOTHY J
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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