SYSTEM AND METHOD FOR GAS LEAK CONTROL IN A SUBSTRATE HOLDER

An electrostatic clamp includes a heating block for heating a substrate, the heating block having a first surface disposed toward the substrate and a second surface opposite the first surface. A base is arranged to adjoin at least a portion of the second surface of the heating block. The adjoined ba...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BLAKE JULIAN G, MUKA RICHARD S, MILLER TIMOTHY J
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An electrostatic clamp includes a heating block for heating a substrate, the heating block having a first surface disposed toward the substrate and a second surface opposite the first surface. A base is arranged to adjoin at least a portion of the second surface of the heating block. The adjoined base and heating block may mutually define an inner gap between a first portion of the heating block and the base. An outer gap is arranged concentric with the inner gap between a second portion of the heating block and the base, the inner and outer gaps being isolated from one another by a first sealing surface formed between the second surface of the heating block and the base.