METHOD OF UPDATING CALIBRATION DATA AND A DEVICE MANUFACTURING METHOD

METHOD OF UPDATING CALIBRATION DATA AND A DEVICE MANUFACTURING METHOD

A method of updating calibration data of a first position detection system adapted to determine the position of an object, is presented. The first position detection system includes a target and a plurality of sensors one of which is mounted on an object and the calibration data including coefficien...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VAN DE MAST FRANCISCUS, VAN DER PASCH ENGELBERTUS ANTONIUS FRANSISCUS
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PHYSICS
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A method of updating calibration data of a first position detection system adapted to determine the position of an object, is presented. The first position detection system includes a target and a plurality of sensors one of which is mounted on an object and the calibration data including coefficients relating an apparent measured position to an actual position and which can be used to convert an apparent measured position to an actual position thereby to correct for physical imperfections in the first position detection system and enable determination of the actual position from the apparent measured position.